Japan Intellectual Property Rights: TWO-FLUID DISCHARGE DEVICE, SUBSTRATE PROCESSING DEVICE AND TWO-FLUID NOZZLE CONTROL METHOD

Japan, July 1 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'TWO-FLUID DISCHARGE DEVICE, SUBSTRATE PROCESSING DEVICE AND TWO-FLUID NOZZLE CONTROL METHOD.' Other related details are as follows:

Application Number: JP,2022-140344

Category (FI): H10P76/00,569@E,H10P76/00,569@C,H10P70/00,103@Z,H10P70/00,103@C,H01L21/30,569@Z,B05B7/04,H10P70/00,103@A,H10P76/00,569@F,H01L21/30,569@F,B05B12/02,H01L21/304,643@Z,H01L21/304,643@C,H01L21/304,643@A,H10P76/00,569@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 2, 2022

Publication Date: March 14, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....