Japan, Nov. 12 -- EBARA CORP has got intellectual property rights for 'TOP RING AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-164921
Category (FI): B24B37/30@E,B24B49/10,H01L21/304,622@K,H10P52/00@N,H10P52/00@T,H10P52/40,B24B37/30@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 13, 2022
Publication Date: April 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....