Japan Intellectual Property Rights: TEMPERATURE CORRECTION INFORMATION CALCULATION DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, PROGRAM, TEMPERATURE CORRECTION INFORMATION CALCULATION METHOD

Japan, Oct. 30 -- TOKYO ELECTRON LTD has got intellectual property rights for 'TEMPERATURE CORRECTION INFORMATION CALCULATION DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, PROGRAM, TEMPERATURE CORRECTION INFORMATION CALCULATION METHOD.' Other related details are as follows:

Application Number: JP,2021-096159

Category (FI): H01L21/316@S,H01L21/31@E

Stage: Grant (IP right document published.)

Filing Date: June 8, 2021

Publication Date: Dec. 20, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....