Japan, March 24 -- ASM IP HOLDING BV has got intellectual property rights for 'TEMPERATURE CONTROLLED REACTION CHAMBER.' Other related details are as follows:
Application Number: JP,2022-044013
Category (FI): C23C16/54,H01L21/205,H01L21/31@B,H10P14/24,H10P14/60,101@B
Stage: Grant (IP right document published.)
Filing Date: March 18, 2022
Publication Date: Oct. 5, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....