Japan, Oct. 30 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'SYSTEM AND METHOD FOR PULSE WIDTH MODULATED DOSE CONTROL.' Other related details are as follows:
Application Number: JP,2024-002916
Category (FI): H01L21/302,101@G,H01L21/31@B,C23C16/455
Stage: Grant (IP right document published.)
Filing Date: Jan. 12, 2024
Publication Date: March 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....