Japan, March 27 -- HITACHI HIGH-TECH CORP has got intellectual property rights for 'SURFACE TREATMENT DEVICE AND PRESSURE CONTROL METHOD THEREFOR.' Other related details are as follows:
Application Number: JP,2022-091343
Category (FI): C23C16/44@B,H01L21/302,101@G,H01L21/31@A,H10P14/60,101@A,H10P14/60,101@B,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 6, 2022
Publication Date: Dec. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....