Japan, Feb. 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUPPORTING DEVICE, METHOD FOR SUPPORTING, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2022-006753
Category (FI): H01L21/02@Z,H10P95/00,102@B,H10P70/00,108@H,H01L21/304,648@H,G05B23/02@T,G05B19/418@Z
Stage: PROBLEM TO BE SOLVED: To provide a supporting device that allows a maintenance worker to rapidly perform a proper maintenance work on a substrate processor regardless of the degree of skills.SOLUTION: A supporting device 4 supports the maintenance work of at least one substrate processor 1. Also, the supporting device 4 acquires separation degree information. The separation degree information shows the degree of separation ...