Japan, June 10 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUCK-BACK METHOD, AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-120649

Category (FI): H01L21/304,651@B,H01L21/304,648@G,H01L21/304,643@C,H10P70/00,103@C,H10P70/00,108@G,H10P70/00,201@B

Stage: Grant (IP right document published.)

Filing Date: July 28, 2022

Publication Date: Feb. 8, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....