Japan Intellectual Property Rights: SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD

Japan, May 21 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHOD.' Other related details are as follows:

Application Number: JP,2022-049363

Category (FI): H10P70/00,108@K,H10P70/00,108@G,H10P50/60@J,H01L21/304,648@K,H01L21/304,648@G,H01L21/306@J

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 25, 2022

Publication Date: Oct. 5, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....