Japan, July 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE TREATMENT APPARATUS AND METHOD FOR SUPPRESSING OXYGEN CONTAMINATION.' Other related details are as follows:
Application Number: JP,2022-085097
Category (FI): C23C16/44@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 25, 2022
Publication Date: Dec. 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....