Japan, Jan. 23 -- CANON INC has got intellectual property rights for 'SUBSTRATE TRANSPORT APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2023-143515
Category (FI): H01L21/68@A,G03F7/20,501,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: Sept. 5, 2023
Publication Date: March 17, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....