Japan, Jan. 28 -- KAWASAKI HEAVY IND LTD has got intellectual property rights for 'SUBSTRATE TRANSFER SYSTEM AND SUBSTRATE TRANSFER METHOD.' Other related details are as follows:

Application Number: JP,2024-190658

Category (FI): B25J19/04,H01L21/68@A,H10P72/30@A

Stage: Grant (IP right document published.)

Filing Date: Oct. 30, 2024

Publication Date: Jan. 24, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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