Japan, Sept. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE TRANSFER SYSTEM AND IMAGE CORRECTION METHOD.' Other related details are as follows:
Application Number: JP,2022-153878
Category (FI): H10P72/30@A,H01L21/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 27, 2022
Publication Date: April 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....