Japan, Nov. 12 -- KAWASAKI HEAVY IND LTD has got intellectual property rights for 'SUBSTRATE TRANSFER ROBOT SYSTEM AND SUBSTRATE TRANSFER METHOD.' Other related details are as follows:
Application Number: JP,2023-042419
Category (FI): H01L21/68@A,H10P72/30@A,B25J13/08@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 16, 2023
Publication Date: Sept. 30, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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