Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE TRANSFER METHOD AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2022-005290

Category (FI): H10P72/50@F,H10P72/30@A,H01L21/68@F,H01L21/68@A

Stage: Grant (IP right document published.)

Filing Date: Jan. 17, 2022

Publication Date: July 28, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....