Japan, Oct. 29 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE SUPPORTER AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2024-044872
Category (FI): H01L21/302,101@B,H01L21/302,101@G,H01L21/68@R,H05H1/46@M
Stage: Grant(IP right document published.)
Filing Date: March 21, 2024
Publication Date: June 4, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....