Japan, Aug. 31 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE SUPPORT UNIT AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-175570
Category (FI): H01L21/68@R,H01L21/302,101@G,H01L21/302,101@B,H10P50/20,101@B,C23C16/458,H10P72/72,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 1, 2022
Publication Date: Jan. 19, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....