Japan, July 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE SUPPORT METHOD AND SUBSTRATE PROCESSING EQUIPMENT.' Other related details are as follows:
Application Number: JP,2022-019507
Category (FI): H01L21/68@R,H10P72/70,H10P72/72
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 10, 2022
Publication Date: Aug. 23, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....