Japan, Feb. 12 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE SUPPORT MEMBER, SUBSTRATE TRANSPORT DEVICE, AND METHOD FOR MANUFACTURING SUBSTRATE SUPPORT MEMBER.' Other related details are as follows:
Application Number: JP,2022-006849
Category (FI): H10P72/30@A,H01L21/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 20, 2022
Publication Date: Aug. 1, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....