Japan, March 26 -- ASML NETHERLANDS BV has got intellectual property rights for 'SUBSTRATE SUPPORT, SUBSTRATE TABLE, AND METHOD.' Other related details are as follows:
Application Number: JP,2025-064797
Category (FI): G03F7/20,501,G03F7/20,521,H01L21/68@K,H01L21/68@N,H10P72/50@K,H10P72/70
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 10, 2025
Publication Date: July 30, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....