Japan Intellectual Property Rights: SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

Japan, Jan. 30 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-202101

Category (FI): H10P70/00,201@C,H10P70/00,102@B,H10P70/00,108@A,H10P70/00,108@D,H10P70/00,201@B,H10P72/30@A,H01L21/306@K,H01L21/304,642@A,H01L21/304,642@B,H01L21/304,648@A,H01L21/304,648@D,H01L21/304,651@B,H01L21/304,651@C,H01L21/68@A,H10P50/60@J,H10P70/00,102@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 29, 2023

Publication Date: June 10, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....