Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM, CONTROL APPARATUS, AND SUBSTRATE CONVEYANCE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-204846
Category (FI): H01L21/02@Z,H01L21/68@A,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: Dec. 21, 2022
Publication Date: July 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....