Japan, Jan. 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING SYSTEM, ALIGNMENT DEVICE, AND SUBSTRATE SHAPE MONITORING METHOD.' Other related details are as follows:

Application Number: JP,2022-044374

Category (FI): H10P72/70,H10P72/50@F,H01L21/68@N,H01L21/68@F

Stage: Grant (IP right document published.)

Filing Date: March 18, 2022

Publication Date: Sept. 29, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....