Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

Japan, Oct. 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM.' Other related details are as follows:

Application Number: JP,2022-188197

Category (FI): H01L21/304,643@A,H01L21/306@R,H10P70/00,108@G,H10P70/00,201@B,H10P70/00,103@A,H10P50/60@R,H01L21/304,651@B,H01L21/304,648@G

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Nov. 25, 2022

Publication Date: June 6, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....