Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

Japan, Aug. 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2024-094380

Category (FI): H01L21/304,648@A,H10P70/00,108@G,H10P70/00,108@A,H10P70/00,102@F,H10P70/00,102@A,B08B3/08@Z,B08B3/02@B,H01L21/304,648@G,H01L21/304,642@A,H01L21/304,642@F

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 11, 2024

Publication Date: Dec. 23, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....