Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

Japan, June 22 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-116934

Category (FI): H01L21/306@R,H01L21/304,651@L,H01L21/304,643@Z,H10P70/00,103@Z,H10P70/00,201@L,H01L21/304,643@D,H10P70/00,103@D,H10P50/60@R

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 22, 2022

Publication Date: Feb. 1, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....