Japan, Feb. 6 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-122034

Category (FI): H10P50/60@J,H01L21/306@J,H01L21/306@Z,H10P50/60@Z,C23F1/00,101

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 29, 2022

Publication Date: Feb. 8, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....