Japan, June 16 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-006018
Category (FI): H01L21/306@G,H10P50/66
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 18, 2023
Publication Date: July 30, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....