Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, June 10 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-045210

Category (FI): H01L21/304,643@A,H01L21/304,648@G,H01L21/304,647@Z,H01L21/304,651@B,H01L21/30,577,B05D1/40@A,B05D7/00@E,B05D3/00@D,B05D3/10@K,B05D3/10@N,H10P76/00,577,H10P70/00,103@A,H10P70/00,107@Z,H10P70/00,108@G,H10P70/00,201@B

Stage: Grant (IP right document published.)

Filing Date: March 22, 2022

Publication Date: Oct. 4, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....