Japan, March 27 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-091976

Category (FI): H01L21/302,201,H01L21/316@S,H10P14/692@S,H10P50/20,201@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 7, 2022

Publication Date: Dec. 19, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....