Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-197286

Category (FI): H01L21/302,201@A,H10P50/20,201@A

Stage: Grant (IP right document published.)

Filing Date: Dec. 9, 2022

Publication Date: June 20, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....