Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, Jan. 28 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2024-218483

Category (FI): H01L21/30,572@A,H01L21/30,572@B,H01L21/304,643@A,H01L21/304,643@C,H01L21/304,645@B,H01L21/304,647@Z,H01L21/304,648@G,H10P70/00,103@A,H10P70/00,103@C,H10P70/00,105@B,H10P70/00,107@Z,H10P70/00,108@G,H10P76/00,572@A,H10P76/00,572@B

Stage: Grant (IP right document published.)

Filing Date: Dec. 13, 2024

Publication Date: March 11, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....