Japan, March 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-060737
Category (FI): H10P50/28,H01L21/302,105@A,H10P50/20,105@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 4, 2023
Publication Date: March 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....