Japan Intellectual Property Rights: SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND PROGRAM

Japan, Sept. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND PROGRAM.' Other related details are as follows:

Application Number: JP,2025-099958

Category (FI): H10P50/60@M,H01L21/306@R,H01L21/306@M,H10P52/00@T,H10P52/00@S,H10P52/00@B,H01L21/304,622@P,H01L21/304,621@A,H10P50/60@R

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 16, 2025

Publication Date: Aug. 15, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....