Japan, June 10 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING EQUIPMENT AND SUBSTRATE TRANSPORTATION METHOD.' Other related details are as follows:
Application Number: JP,2024-173215
Category (FI): H10P72/30@A,H01L21/68@A
Stage: Grant (IP right document published.)
Filing Date: Oct. 2, 2024
Publication Date: Dec. 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....