Japan, Aug. 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING EQUIPMENT, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-119412

Category (FI): H10P72/70,H10W95/00@C,H01L21/68@A,H01L21/68@N,H10P72/30@A,H01L21/02@C,H10P56/00@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 27, 2022

Publication Date: Feb. 8, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....