Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE

Japan, Jan. 28 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2021-099296

Category (FI): F24F7/06@C,H01L21/30,562,H01L21/30,564@C,H01L21/30,569@C,H01L21/30,572@B,H01L21/304,643@A,H01L21/304,648@A,H01L21/304,648@L,H01L21/68@A,H10P70/00,103@A,H10P70/00,108@A,H10P70/00,108@L,H10P72/30@A,H10P76/00,562,H10P76/00,564@C,H10P76/00,569@C,H10P76/00,572@B

Stage: Grant (IP right document published.)

Filing Date: June 15, 2021

Publication Date: Sept. 7, 2022

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....