Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Japan, July 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-159393

Category (FI): H01L21/68@A,H10P72/70,H10P72/30@A,H10P70/00,108@D,H10P70/00,102@A,H10P50/60@J,H01L21/68@N,H01L21/306@K,H01L21/304,648@D,H01L21/304,642@A

Stage: PROBLEM TO BE SOLVED: To provide a substrate processing device and a substrate processing method, capable of maintaining the uniformity of substrate surface treatment while preventing a tilt of the substrate.SOLUTION: Surface treatment is performed while a substrate W is immersed in processing liquid stored in a processing tank 10. During treatment, a holding state is...