Japan, May 13 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2025-061990

Category (FI): H10P70/00,201@N,H01L21/304,651@Z,H10P70/00,201@Z,H01L21/304,648@G,H10P70/00,108@G

Stage: Grant (IP right granted following substantive examination.)

Filing Date: April 3, 2025

Publication Date: July 8, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....