Japan, Oct. 29 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2021-194855
Category (FI): H01L21/304,643@A,H01L21/304,648,H01L21/304,651@A
Stage: Grant(IP right document published.)
Filing Date: Nov. 30, 2021
Publication Date: June 9, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....