Japan, Aug. 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, TRANSFER TEACHING METHOD.' Other related details are as follows:
Application Number: JP,2022-105565
Category (FI): B25J9/22@Z,H10P72/30@A,H01L21/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 30, 2022
Publication Date: Jan. 17, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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