Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

Japan, Jan. 28 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-030897

Category (FI): H01L21/304,643@A,H01L21/304,648@Z,H01L21/68@N,H10P70/00,103@A,H10P70/00,108@Z,H10P72/70

Stage: Grant (IP right document published.)

Filing Date: March 1, 2022

Publication Date: Sept. 13, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....