Japan, Jan. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND MAINTENANCE METHOD.' Other related details are as follows:
Application Number: JP,2024-073414
Category (FI): H01L21/302,101@C,H01L21/302,101@D,H01L21/302,101@M,H01L21/31@C,H01L21/68@N,H10P14/60,101@C,H10P50/20,101@C,H10P50/20,101@D,H10P50/20,101@M,H10P72/70
Stage: Grant (IP right document published.)
Filing Date: April 30, 2024
Publication Date: July 24, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....