Japan, Jan. 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2024-113570
Category (FI): H10P76/00,562,H01L21/68@A,H01L21/30,562,H10P72/30@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 16, 2024
Publication Date: Oct. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....