Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS

Japan, Sept. 18 -- BROOKS AUTOMATION US LLC has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2023-093353

Category (FI): H10P72/30@A,H01L21/68@A,B25J9/06@D

Stage: PROBLEM TO BE SOLVED: To provide a transfer robot that allows the transport of substrates to at least two processing stations in a sequential linear arrangement using a stationary drive section.SOLUTION: A transfer robot 130 includes a drive section 200 and at least one transfer arm section 210. The at least one transfer arm section includes: at least one base arm 220 fixed at one end with respect to a transfer chamber and rotatably coupled to the drive section; and at least one transfer arm 2...