Japan, Aug. 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2025-085647
Category (FI): H10P50/20,105@Z,H01L21/302,105@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 22, 2025
Publication Date: Aug. 5, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....