Japan, July 31 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-132491
Category (FI): H01L21/304,648@A,H10P70/00,108@A,H10P72/30@A,H01L21/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 23, 2022
Publication Date: March 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....