Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS

Japan, July 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-134813

Category (FI): H01L21/304,648@G,H01L21/304,643@A,H01L21/304,651@L,H01L21/304,651@M,H10P70/00,103@A,H10P70/00,108@G,H10P70/00,201@M,H10P70/00,201@L

Stage: PROBLEM TO BE SOLVED: To observe a peripheral edge portion of a substrate such as a semiconductor wafer while restraining a thermal effect by a heating mechanism for obtaining heating gas in a substrate processing apparatus that performs heating of the substrate with the heating gas and processing on the peripheral edge portion of the substrate while holding the substrate in an internal space of a cha...