Japan, July 1 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-214822
Category (FI): F27B9/02,F27B9/30,H01L21/31@B,H01L21/68@A,H10P95/00,H10P72/30@A,H10P14/60,101@B,H01L21/02@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 20, 2023
Publication Date: Aug. 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....