Japan, June 16 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-123167
Category (FI): H01L21/304,646,H01L21/304,648@L,H10P70/00,106,H10P70/00,103@A,H01L21/304,643@A,H10P70/00,108@L
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 2, 2022
Publication Date: Feb. 15, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....